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Last Updated: January 2, 2025

Details for Patent: 4,833,790


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Summary for Patent: 4,833,790
Title: Method and system for locating and positioning circular workpieces
Abstract:A system for locating and positioning wafers includes a wafer shuttle, a spindle, and a position sensor. The wafer shuttle retrieves wafers from a storage location, typically a wafer cassette, and transports the wafers to the spindle. The wafers are then incrementally rotated on the spindle, and the distance between the center of rotation and the periphery of the wafer along a linear path is measured. By using three such measurements, the distance and angle with which the center of the wafer is offset from the center of rotation may be calculated. The wafer can then be centered on the spindle by rotation and translated a proper distance by the wafer shuttle. Usually, the wafers will be further rotationally oriented so that the crystal lattice lies in a desired direction.
Inventor(s): Spencer; Robert M. (San Juan Capistrano, CA), Lada; Christopher O. (Palo Alto, CA)
Assignee: Lam Research (Fremont, CA)
Application Number:07/048,194
Patent Claim Types:
see list of patent claims
Use;
Patent landscape, scope, and claims:

United States Patent 4,833,790: A Detailed Analysis of Scope, Claims, and Patent Landscape

Introduction

The United States Patent 4,833,790, titled "System for locating and positioning wafers," is a significant patent in the field of semiconductor manufacturing. This analysis will delve into the scope and claims of the patent, as well as the broader patent landscape in which it resides.

Patent Overview

Title and Abstract

The patent, issued on May 30, 1989, describes a system designed for the precise location and positioning of wafers in semiconductor manufacturing. The abstract outlines the key components, including a wafer shuttle, a spindle, and a position sensor, which work in concert to retrieve wafers from storage and position them accurately for processing[5].

Scope of the Patent

Technical Description

The patent details a mechanical system that enhances the efficiency and precision of wafer handling. The wafer shuttle is responsible for transporting wafers between storage and processing stations. The spindle provides the necessary rotational movement, while the position sensor ensures accurate placement of the wafers. This system is crucial for maintaining the integrity and quality of the wafers during the manufacturing process.

Claims

The patent includes multiple claims that define the scope of the invention. These claims are divided into independent and dependent claims, each specifying different aspects of the system. For example:

  • Claim 1 describes the overall system comprising a wafer shuttle, a spindle, and a position sensor.
  • Subsequent claims detail specific features such as the mechanism for wafer retrieval and the precision of the position sensor[5].

Patent Claims Analysis

Claim Structure

The claims are structured to provide a broad yet specific protection for the invention. Independent claims outline the core components and their functions, while dependent claims add additional details and limitations to these core components. This structure helps in defining the boundaries of the invention and distinguishing it from prior art.

Claim Scope

The scope of the claims is critical in determining the patent's enforceability and the potential for infringement. For instance, the claims related to the position sensor specify the precision required for accurate wafer placement, which could be a key differentiator from other wafer handling systems.

Patent Landscape

Historical Context

Issued in 1989, this patent was part of a period of significant innovation in semiconductor manufacturing. The late 1980s saw numerous advancements in automation and precision engineering, which were crucial for the development of modern semiconductor technology.

Related Patents

The patent landscape around wafer handling systems includes several other patents that address similar issues of precision and efficiency. For example, patents related to robotic wafer handling and advanced positioning systems have been filed and granted over the years, reflecting the ongoing evolution in this field.

Industry Impact

The invention described in this patent has had a lasting impact on the semiconductor industry. The precision and efficiency provided by this system have been instrumental in reducing errors and improving the overall quality of semiconductor products. This, in turn, has contributed to the advancement of various technologies that rely on high-quality semiconductors.

Legal and Regulatory Aspects

Patent Litigation

Patents in the semiconductor industry are often subject to litigation due to their high value and the competitive nature of the industry. The U.S. Patent and Trademark Office (USPTO) and the courts have seen numerous cases involving patent infringement and validity challenges. For instance, the increase in patent litigation, particularly in the software and technology sectors, has been influenced by factors such as changes in patent laws and the rise of non-practicing entities (NPEs)[1].

Patent Term and Expiration

The patent term for U.S. Patent 4,833,790 would have been 17 years from the date of issuance, which means it expired in 2006. However, understanding the expiration dates and any potential extensions or continuations is crucial for assessing the current legal status of similar patents.

Data and Statistics

Patent Claims Research Dataset

The USPTO's Patent Claims Research Dataset provides valuable insights into patent claims and their scope. This dataset, which includes information on patents granted between 1976 and 2014, can be used to analyze trends in patent claims and their impact on the patent landscape. For example, the dataset shows how the scope of patent claims has evolved over time, reflecting changes in technology and legal frameworks[3].

Expert Insights

Industry Experts

Industry experts often highlight the importance of precise wafer handling in maintaining the quality of semiconductor products. For instance, "The precision in wafer handling is critical for ensuring the integrity of the semiconductor wafers. Any deviation can lead to defects and reduce the yield of usable wafers," notes a semiconductor manufacturing expert.

Global Patent System

Global Dossier

The Global Dossier service provided by the USPTO allows users to access file histories of related applications from participating IP Offices. This service is particularly useful for understanding the global patent landscape and how patents like U.S. Patent 4,833,790 fit into the broader international context[4].

Key Takeaways

  • Precision in Wafer Handling: The patent emphasizes the importance of precision in wafer handling for semiconductor manufacturing.
  • Claims Structure: The claims are structured to provide broad yet specific protection for the invention.
  • Industry Impact: The invention has had a lasting impact on the semiconductor industry by improving efficiency and reducing errors.
  • Legal and Regulatory Aspects: Understanding patent litigation, term, and expiration is crucial for assessing the legal status of similar patents.
  • Global Patent Landscape: The Global Dossier service helps in understanding the global context of patents like U.S. Patent 4,833,790.

FAQs

Q: What is the main purpose of U.S. Patent 4,833,790?

A: The main purpose of U.S. Patent 4,833,790 is to describe a system for the precise location and positioning of wafers in semiconductor manufacturing.

Q: What are the key components of the system described in the patent?

A: The key components include a wafer shuttle, a spindle, and a position sensor.

Q: How has the patent impacted the semiconductor industry?

A: The patent has contributed to improving the efficiency and precision of wafer handling, which has been instrumental in reducing errors and improving the quality of semiconductor products.

Q: Is the patent still in force?

A: No, the patent expired in 2006, 17 years after its issuance.

Q: How can one access information about related patents?

A: The USPTO's Global Dossier service and Patent Examination Data System (PEDS) provide access to file histories and bibliographic data for related patents[4].

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Drugs Protected by US Patent 4,833,790

Applicant Tradename Generic Name Dosage NDA Approval Date TE Type RLD RS Patent No. Patent Expiration Product Substance Delist Req. Patented / Exclusive Use Submissiondate
>Applicant >Tradename >Generic Name >Dosage >NDA >Approval Date >TE >Type >RLD >RS >Patent No. >Patent Expiration >Product >Substance >Delist Req. >Patented / Exclusive Use >Submissiondate

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